JPH0254237U - - Google Patents
Info
- Publication number
- JPH0254237U JPH0254237U JP13416588U JP13416588U JPH0254237U JP H0254237 U JPH0254237 U JP H0254237U JP 13416588 U JP13416588 U JP 13416588U JP 13416588 U JP13416588 U JP 13416588U JP H0254237 U JPH0254237 U JP H0254237U
- Authority
- JP
- Japan
- Prior art keywords
- oxide film
- semiconductor wafer
- field oxide
- wafer
- flatten
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
- 238000009413 insulation Methods 0.000 claims 1
- 238000002955 isolation Methods 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Local Oxidation Of Silicon (AREA)
- Element Separation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13416588U JPH0254237U (en]) | 1988-10-13 | 1988-10-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13416588U JPH0254237U (en]) | 1988-10-13 | 1988-10-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0254237U true JPH0254237U (en]) | 1990-04-19 |
Family
ID=31392674
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13416588U Pending JPH0254237U (en]) | 1988-10-13 | 1988-10-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0254237U (en]) |
-
1988
- 1988-10-13 JP JP13416588U patent/JPH0254237U/ja active Pending